XUV Lasers

Tabletop and desktop EUV lasers

• General references

10 µJ desktop EUV laser - Applications

• Imaging
• Nanomachining
• Lithography
• Photochemistry and photophysics

Higher power tabletop laser - Applications

• Ablation
• Plasma diagnosis
• Imaging
• Holography
• Nanopatterning
• Characterization of optical components and materials

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